Probe Station Secures On-Wafer Measurements

Feb. 21, 2013
An on-wafer probe station can be configured for semiautomatic or fully automatic operation using powerful control software.

Model CM300 from Cascade Microtech is an on-wafer measurement solution that can be scaled to meet a wide range of needs. It features efficient test automation and fast wafer loading by means of Velox™ control software, at the same time avoiding damage to probe tips and probe cards. The CM300 probe station, which provides high accuracy using probe pads as small as 30 μm, can be used for current-voltage (I-V), capacitance-voltage (C-V), and RF/microwave measurements over a wide temperature range. It delivers fast and well-characterized thermal transition and probe-to-pad alignment. The fully automated probe system offers cassette loading for a single station—or dual stations operating as a cluster—and supports parallel test of multiple device die. The prober is available as a shielded system, and can be upgraded from a semi-automated station to a fully automated probe system.

Cascade Microtech, Inc., 9100 SW Gemini Dr., Beaverton, OR 97008; (800) 550-3279, (503) 601-1000, FAX: (503) 601-1002,

About the Author

Jack Browne | Technical Contributor

Jack Browne, Technical Contributor, has worked in technical publishing for over 30 years. He managed the content and production of three technical journals while at the American Institute of Physics, including Medical Physics and the Journal of Vacuum Science & Technology. He has been a Publisher and Editor for Penton Media, started the firm’s Wireless Symposium & Exhibition trade show in 1993, and currently serves as Technical Contributor for that company's Microwaves & RF magazine. Browne, who holds a BS in Mathematics from City College of New York and BA degrees in English and Philosophy from Fordham University, is a member of the IEEE.

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