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Pointing to Progress in Probe Stations (.PDF Download)

Wafer probes and probe stations are marvels of mechanical engineering. They are capable of delicately maneuvering measurement probe contacts onto micron-sized circuit features with enough contact force to make meaningful measurements without causing damage to the circuits. As semiconductor wafers have grown in size, designers of wafer probe stations have responded with probe stations capable of handling larger wafers with precision. At higher frequencies, it is the precision needed for

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