Miniaturization has allowed a growing number of electronic functions to be packed into pocket-sized designs and, in the case of microelectromechanical-systems (MEMS) devices, even mechanical functions can be included in those designs. MEMS devices are perhaps best known as miniature switches, although they are also gaining popularity when used as frequency sources, such as oscillators. They can be packaged in similarly small enclosures as purely electronic devices, but how do MEMS devices dif
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